Structural and optical properties of sputtered aluminum-doped zinc oxide thin films

Title
Structural and optical properties of sputtered aluminum-doped zinc oxide thin films
Author(s)
KANG, HYUN IL; LEE, GI SEUNG; Han, Taek Hee
KIOST Author(s)
Han, Taek Hee(한택희)
Alternative Author(s)
한택희
Publication Year
2009-09-25
URI
https://sciwatch.kiost.ac.kr/handle/2020.kiost/41563
Bibliographic Citation
The 2nd International Conference on Microelectronics and Plasma Technology (ICMAP 2009), 2009
Publisher
Structural and optical properties of sputtered aluminum-doped zinc oxide thin films
Type
Conference
Language
English
Publisher
Structural and optical properties of sputtered aluminum-doped zinc oxide thin films
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