Structural and optical properties of sputtered aluminum-doped zinc oxide thin films
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Title
- Structural and optical properties of sputtered aluminum-doped zinc oxide thin films
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Author(s)
- KANG, HYUN IL; LEE, GI SEUNG; Han, Taek Hee
- KIOST Author(s)
- Han, Taek Hee(한택희)
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Alternative Author(s)
- 한택희
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Publication Year
- 2009-09-25
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URI
- https://sciwatch.kiost.ac.kr/handle/2020.kiost/41563
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Bibliographic Citation
- The 2nd International Conference on Microelectronics and Plasma Technology (ICMAP 2009), 2009
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Publisher
- Structural and optical properties of sputtered aluminum-doped zinc oxide thin films
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Type
- Conference
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Language
- English
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