Quality factor in clamping loss of nanocantilever resonators

Abstract

Clamping loss caused by elastic wave radiation to a support is one of the most dominant loss mechanisms in predicting the quality factor of very or ultra high frequency nanocantilever resonators. To consider nanosurface effects and different scales of the resonator and support, we propose a multiscale model combining a scale-bridging model for the resonator and a perfectly matched layer to estimate the loss in the support. The proposed model is used to investigate the surface effect on the nanoresonator and also shows the tradeoff between the resonant frequency and the quality factor with or without the surface effects. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3575560]