Alignment state estimation simulation of Korsch type telesope based on DDE programming

Abstract

For precision alignment state estimation of a Korsch type optical system, we used sensitivity table method using ZEMAX-MATLAB Dynamic Data Exchange (DDE) programing. We performed two case studies to verify the feasibility of sensitivity table method using ZEMAX-MATLAB DDE. The first case is to change the number of field to align from one to nine, and compensating with secondary and tertiary mirror independently. The second case is to compensate with secondary and tertiary mirror simultaneously using fields mentioned. We input misalignment randomly with five degrees of freedom (decenter X, Y, tilt X, Y, and defocus) to compensators within the range that is 5 times larger than the alignment tolerance. The simulation results show that we can meet the requirement (1/15λ RMS wavefront error at 638nm) with 3 or 4 alignment steps.ble method using ZEMAX-MATLAB DDE. The first case is to change the number of field to align from one to nine, and compensating with secondary and tertiary mirror independently. The second case is to compensate with secondary and tertiary mirror simultaneously using fields mentioned. We input misalignment randomly with five degrees of freedom (decenter X, Y, tilt X, Y, and defocus) to compensators within the range that is 5 times larger than the alignment tolerance. The simulation results show that we can meet the requirement (1/15λ RMS wavefront error at 638nm) with 3 or 4 alignment steps.